Susumu Sugiyama,Professor, Research Organization of Science and Technology, Ritsumeikan University; Representative Director, Support Organization for Research on Industrial Science and Technology Research: MEMS, Piezoresistive Mechanical Sensor Devices, and LIGA Process Technology have been researched at Research Institute for Micro System Technology. Recently, Environmentally Friendly Polymer MEMS Process Technology has been mainly studied. The research group is achieving many practical results for Sensors, Actuators, and Process Technology by the collaboration with industries.